Optical constants of Si-O (Non-stoichiometric silicon oxide)
Herguedas and Carretero 2023: SiO1.71; n,k 5.0–25 µm
Complex refractive index (n+ik)
Derived optical constants
Conditions & Spec sheet
n_is_absolute: true wavelength_is_vacuum: true
SiO1.71. Sputtered Si with 40 sccm O2 and 160 sccm Ar, which is equivalent to a oxygen partial pressure of 3.2 × 10-4 mbar and a total pressure of 1.7 × 10-3 mbar. Room temperature.
N. Herguedas and E. Carretero. Optical properties in mid-infrared range of silicon oxide thin films with different stoichiometries, Nanomaterials 13, 2749 (2023)