Optical constants of TiN (Titanium nitride)
Shkondin et al. 2017: Annealed at 900 °C; n,k 0.211–1.69 µm
Wavelength:
µm
(0.21073 – 1.68888)
Complex refractive index (n+ik)
n
k
LogX
LogY
eV
Derived optical constants
Conditions & Spec sheet
n_absolute: true wavelength_vacuum: true film_thickness: 105 nm substrate: Si annealing_temperature: 900 °C
Comments
105 nm thick titanium nitride (TiN) film on Si substrate annealed at 900 °C.
References
E. Shkondin, T. Repän, O. Takayama, and A. V. Lavrinenko. High aspect ratio titanium nitride trench structures as plasmonic biosensor, Opt. Mater. Express 7, 4171-4182 (2017) (Numerical data kindly provided by Osamu Takayama)
Data
INFO
Titanium nitride, TiN
Other names
- Tinite
- TiNite