Optical constants of Si3N4, SiN (Silicon nitride)
Vogt 2015: Non-stoichiometric SiN #2; n,k 0.25-1.7 µm
Wavelength:
µm
(0.25–1.7)
Complex refractive index (n+ik)
n
k
LogX
LogY
eV
Derived optical constants
Conditions & Spec sheet
film_thickness: 67e-9 substrate: Si
Comments
67 nm thick silicon-nitride (SiN) film on a polished Si wafer. n = 2.09 @ 633 nm. Room temperature.
References
M. R. Vogt. Development of physical models for the simulation of optical properties of solar cell modules, PhD. Thesis (2015)