Optical constants of HfO2 (Hafnium dioxide, Hafnia)
Bright et al. 2012: n,k 0.385–500 µm
Wavelength:
µm
(3.8462e-01–5.0000e+02)
Complex refractive index (n+ik)
n
k
LogX
LogY
eV
Derived optical constants
Conditions & Spec sheet
substrate: Si
Comments
Thin hafnia films of thicknesses from about 180 to 500 nm deposited on Si substrates using reactive magnetron sputtering.
References
T. J. Bright, J. I. Watjen, Z. M. Zhang, C. Muratore, A. A. Voevodin. Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared. Thin Solid Films 520, 6793–6802 (2012)
[Calculation script (Python)]
Data
INFO
Hafnium dioxide, HfO2
Other names
- Hafnia
- Hafnium(IV) oxide
- Hafnium oxide