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Optical constants of HfO2 (Hafnium dioxide, Hafnia)
Bright et al. 2012: n,k 0.385–500 µm

Wavelength: µm
 (3.8462e-01 – 5.0000e+02)  
 

Complex refractive index (n+ik)[ i ]


n   k   LogX   LogY   eV

Derived optical constants

Conditions & Spec sheet

substrate: Si

Comments

Thin hafnia films of thicknesses from about 180 to 500 nm deposited on Si substrates using reactive magnetron sputtering.

References

T. J. Bright, J. I. Watjen, Z. M. Zhang, C. Muratore, A. A. Voevodin. Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared. Thin Solid Films 520, 6793–6802 (2012)
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Data

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INFO

Hafnium dioxide, HfO2

Other names

  • Hafnia
  • Hafnium(IV) oxide
  • Hafnium oxide

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