Optical constants of AlN (Aluminium nitride)
Beliaev et al. 2021: Non-stoichiometric AlN; n,k 0.211–1.69 µm
Wavelength:
µm
(0.21140–1.68816)
Complex refractive index (n+ik)
n
k
LogX
LogY
eV
Derived optical constants
Comments
303 nm thick aluminum nitride (AlN) film deposited by reactive sputtering.
References
1) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama.
Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths.
J. Vac. Sci. Technol. A 39, 043408 (2021)
2) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths [J. Vac. Sci. Technol. A 39, 043408 (2021)].
J. Vac. Sci. Technol. A 40, 027001 (2022)
(Numerical data kindly provided by Osamu Takayama)