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Optical constants of AlN (Aluminium nitride)
Beliaev et al. 2021: n,k 0.211–1.69 µm

Wavelength: µm
 (0.21140 – 1.68816)  
 

Complex refractive index (n+ik)[ i ]


n   k   LogX   LogY   eV

Derived optical constants

Comments

303 nm thick aluminum nitride (AlN) film deposited by reactive sputtering.

References

1) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths, J. Vac. Sci. Technol. A 39, 043408 (2021)
2) L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Erratum: Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths [J. Vac. Sci. Technol. A 39, 043408 (2021)], J. Vac. Sci. Technol. A 40, 027001 (2022)
(Numerical data kindly provided by Osamu Takayama)

Data

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INFO

Aluminium nitride, AlN

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