Refractive index of Negative tone photoresists - microresist_ma-N405

Optical constants of Negative tone photoresists
Micro resist ma-N 405 and ma-T 1050, 1:1

Wavelength: µm

(0.3750–1.6900)

Complex refractive index (n+ik)[ i ]

Derived optical constants

Comments

Spin-coated negative photoresist ma-N 405 diluted with ma-T 1050 (micro resist technology GmbH) in a 1:1 ratio.

References

S. Sarkar, V. Gupta, M. Kumar, J. Schubert, P.T. Probst, J. Joseph, T.A.F. König, Hybridized guided-mode resonances via colloidal plasmonic self-assembled grating, ACS Appl. Mater. Interfaces, 11, 13752-13760 (2019)
(Numerical data kindly provided by Dr. Tobias König)

Data

[CSV - comma separated] [TXT - tab separated] [Full database record]

Optical transmission calculator

Wavelength: µm
Thickness:
Calculation method:

Transmittance[ i ]

T =

LogX LogY eV

Reflection calculator

Wavelength: µm
Angle of incidence (0~90°):
Direction: in out

Reflectance[ i ]

P-polarized

R_P =

S-polarized

R_S =

Non-polarized (Rp+Rs)/2

R =

R_P R_S R LogY

Reflection phase[ i ]

ɸ_P = °
ɸ_S = °

Brewster's angle[ i ]

θ_B = °

Critical angle[ i ] [ i ]

θ_C = °

INFO

Resists

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)

RefractiveIndex.INFO

Optical constants of Negative tone photoresists
Micro resist ma-N 405 and ma-T 1050, 1:1

Complex refractive index (n+ik)[ i ]

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Comments

References

Data

Optical transmission calculator

Transmittance[ i ]

Reflection calculator

Reflectance[ i ]

P-polarized

S-polarized

Non-polarized (Rp+Rs)/2

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresistsMicro resist ma-N 405 and ma-T 1050, 1:1

Complex refractive index (n+ik)[ i ]

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Comments

References

Data

Optical transmission calculator

Transmittance[ i ]

Reflection calculator

Reflectance[ i ]

P-polarized

S-polarized

Non-polarized (Rp+Rs)/2

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresists
Micro resist ma-N 405 and ma-T 1050, 1:1