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Optical constants of Negative tone photoresists
Micro resist ma-N 1407

Wavelength: µm
 (0.3014 – 1.6880)  
 

Complex refractive index (n+ik)[ i ]


n   k   LogX   LogY   eV

Derived optical constants

Conditions & Spec sheet

n_absolute: true
wavelength_vacuum: true
film_thickness: 1000 nm
substrate: glass

Comments

Negative tone resist (ma-N 1407) thin film (thickness 1000 nm) on glass substrate.

References

S. Joseph, S. Sarkar, J. Joseph, Grating-coupled surface plasmon-polariton sensing at a flat metal–analyte interface in a hybrid-configuration, ACS Appl. Mater. Interfaces, 12, 46519-46529 (2020)
(Numerical data kindly provided by Prof. Joby Joseph)

Data

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INFO

Resists

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)

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