Refractive index of Negative tone photoresists

Optical constants of Negative tone photoresists
Micro resist ma-N 1407

Wavelength: µm

(0.3014–1.6880)

Complex refractive index (n+ik)[ i ]

Derived optical constants

Conditions & Spec sheet

n_is_absolute: true
wavelength_is_vacuum: true
film_thickness: 1000 nm
substrate: glass

Comments

Negative tone resist (ma-N 1407) thin film (thickness 1000 nm) on glass substrate.

References

S. Joseph, S. Sarkar, J. Joseph, Grating-coupled surface plasmon-polariton sensing at a flat metal–analyte interface in a hybrid-configuration, ACS Appl. Mater. Interfaces, 12, 46519-46529 (2020)
(Numerical data kindly provided by Prof. Joby Joseph)

Data

[CSV - comma separated] [TXT - tab separated] [Full database record]

Optical transmission calculator

Wavelength: µm
Thickness:
Calculation method:

Transmittance[ i ]

T =

LogX LogY eV

Reflection calculator

Wavelength: µm
Angle of incidence (0~90°):
Direction: in out

Reflectance[ i ]

P-polarized

R_P =

S-polarized

R_S =

Non-polarized (Rp+Rs)/2

R =

R_P R_S R LogY

Reflection phase[ i ]

ɸ_P = °
ɸ_S = °

Brewster's angle[ i ]

θ_B = °

Critical angle[ i ] [ i ]

θ_C = °

INFO

Resists

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)

RefractiveIndex.INFO

Optical constants of Negative tone photoresists
Micro resist ma-N 1407

Complex refractive index (n+ik)[ i ]

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Conditions & Spec sheet

Comments

References

Data

Optical transmission calculator

Transmittance[ i ]

Reflection calculator

Reflectance[ i ]

P-polarized

S-polarized

Non-polarized (Rp+Rs)/2

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresistsMicro resist ma-N 1407

Complex refractive index (n+ik)[ i ]

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Conditions & Spec sheet

Comments

References

Data

Optical transmission calculator

Transmittance[ i ]

Reflection calculator

Reflectance[ i ]

P-polarized

S-polarized

Non-polarized (Rp+Rs)/2

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresists
Micro resist ma-N 1407