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Optical constants of Negative tone photoresists
Microchem SU-8 3000

Wavelength: µm
 (0.32 – 1.7)  
 

Derived optical constants

logX   logY   eV

Dispersion formula [ i ]

$$n=1.5525+0.00629λ^{-2}+0.0004λ^{-4}$$

Comments

Microchem SU-8 3000 permanent epoxy negative photoresist

References

Microchem SU-8 3000 Data Sheet, 2011

Data

[Expressions for n]   [CSV - comma separated]   [TXT - tab separated]   [Full database record]

INFO

Resists

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)

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