Optical constants of Negative tone photoresists
Microchem SU-8 2000

Wavelength: µm

(0.32 – 0.8)

Derived optical constants

logX logY eV

Dispersion formula [ i ]

$$n=1.566+0.00796λ^{-2}+0.00014λ^{-4}$$

Comments

Microchem SU-8 2000 permanent epoxy negative photoresist. Uncured.

References

Microchem SU-8 2000 Data Sheet, 2011

Data

[Expressions for n] [CSV - comma separated] [TXT - tab separated] [Full database record]

Optical transmission calculator

Thickness:
Calculation method:

Transmittance (at µm)[ i ]

T =

logX logY eV

Reflection calculator

Angle of incidence (0~90°):
Direction: in out

Reflectance (at µm)[ i ]

R_S = (S-polarized)
R_P = (P-polarized)
R = (non-polarized, (R_S+R_P)/2 )

Reflection phase[ i ]

ɸ = °
ɸ_S = °
ɸ_P = °

Brewster's angle[ i ]

θ_B = °

Critical angle[ i ] [ i ]

θ_C = °

INFO

Resists

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)

RefractiveIndex.INFO

Refractive index database

Optical constants of Negative tone photoresists
Microchem SU-8 2000

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Dispersion formula [ i ]

Comments

References

Data

Optical transmission calculator

Transmittance (at µm)[ i ]

Reflection calculator

Reflectance (at µm)[ i ]

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresistsMicrochem SU-8 2000

Refractive index[ i ]

Extinction coefficient[ i ]

Derived optical constants

Relative permittivity (dielectric constants)[ i ] [ i ]

Absorption coefficient[ i ] [ i ]

Abbe number[ i ]

Chromatic dispersion[ i ]

Group index[ i ] [ i ]

Group velocity dispersion[ i ] [ i ] [ i ]

Dispersion formula [ i ]

Comments

References

Data

Optical transmission calculator

Transmittance (at µm)[ i ]

Reflection calculator

Reflectance (at µm)[ i ]

Reflection phase[ i ]

Brewster's angle[ i ]

Critical angle[ i ] [ i ]

INFO

Resists

External links

Optical constants of Negative tone photoresists
Microchem SU-8 2000