Optical constants of TiN (Titanium nitride)
Beliaev et al. 2023: ALD; n,k 2.00-20.0 µm
Complex refractive index (n+ik)
Derived optical constants
Conditions
film_thickness: 1.0E-7 substrate: Si
Comments
100 nm thick TiN film deposited by atomic layer deposition at 500 °C with post-annealing at 900 °C.
References
L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Titanium nitride nanotrench metasurfaces for mid-infrared chemical sensing. ACS Appl. Opt. Mater. 2, 88-96 (2023) (Numerical data kindly provided by Osamu Takayama)
Data
Additional information
About Titanium nitride
Titanium nitride (TiN) is a hard ceramic material characterized by its golden appearance. Due to its high hardness and resistance to wear, TiN is commonly used as a coating on tools, such as drill bits and end mills, to extend their life and improve their performance. The coating also exhibits a low coefficient of friction, which reduces galling and seizing. Moreover, its corrosion resistance makes it suitable for biomedical applications, such as coatings on surgical instruments and orthopedic implants. In electronics, TiN serves as a barrier layer between metals in integrated circuits. It's typically deposited using physical vapor deposition (PVD) or chemical vapor deposition (CVD) techniques. Additionally, its metallic luster and gold hue make it a popular decorative coating for architectural and consumer products.
Other names and variations:- TiN
- Tinite
- TiNite