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Optical constants of Negative tone photoresists
Micro resist EpoClad

Wavelength: µm
 (0.45 – 1.55)  
 

Other optical constants

logX   logY   eV

Dispersion formula [ i ]

$$n=1.560+0.0073λ^{-2}+0.00038λ^{-4}$$

Comments

Micro resist EpoClad negative photoresist for waveguide manufacturing

Data

[Expressions for n]   [CSV - comma separated]   [TXT - tab separated]   [Full database record]

References

Micro resist EpoCore and EpoClad datasheet, 2015

More info - wiki

In semiconductor fabrication, a resist is a thin layer used to transfer a circuit pattern to the semiconductor substrate which it is deposited upon. (from Wikipedia)


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